M. Tawfeek; Mustafa K. Jassim; Firas M. Hady; Rafah I. Nori
(University of Diyala, 2015)
Sputtering yield behaviour of target bombarded by Argon ions plasma is studied
through the reduction of TRIM ( Transport of Ions in Matter ) simulation data . The angular
dependence of normalized sputtering yield of GaAs ...