Intessar K.abd; Abtisam K.al-Bity; Ahmed A.Esmael; Salah A. Bayat
(university of Diyala, 2012)
In this paper wet etching was used to etch Si-wafers by chemical solution KOH at different
temperature and concentrations, the results showed: - decreasing of the etching rate at higher
KOH concentrations producing smooth ...